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FOUP AOI
• High-Resolution Metrology & Automated Optical Inspection System
• Dimensional Measurement Compliant with SEMI Standards
• Flexible Configuration for Measurement and Inspection Parameters
• Integrated Capabilities for Inflation Valve, Flow Rate, and Torque Measurement
• SEMI E84 Compliant for Fully Automated Material Handling and Inspection
• Dimensional Measurement Compliant with SEMI Standards
• Flexible Configuration for Measurement and Inspection Parameters
• Integrated Capabilities for Inflation Valve, Flow Rate, and Torque Measurement
• SEMI E84 Compliant for Fully Automated Material Handling and Inspection
